Method for fabricating flip-attached an underfilled semiconductor devices

ABSTRACT

A semiconductor device ( 1700 ), which comprises a workpiece ( 1201 ) with an outline ( 1711 ) and a plurality of contact pads ( 1205 ) and further an external part ( 1701 ) with a plurality of terminal pads ( 1702 ). This part is spaced from the workpiece, and the terminal pads are aligned with the workpiece contact pads, respectively. A reflow element ( 1203 ) interconnects each of the contact pads with its respective terminal pad. Thermoplastic material ( 1204 ) fills the space between the workpiece and the part; this material adheres to the workpiece, the part and the reflow elements. Further, the material has an outline ( 1711 ) substantially in line with the outline of the workpiece, and fills the space ( 1707 ) substantially without voids. Due to the thermoplastic character of the filling material, the finished device can be reworked, when the temperature range for reflowing the reflow elements is reached.

FIELD OF THE INVENTION

The present invention is related in general to the field of electronicsystems and semiconductor devices and more specifically to methods forfabricating flip-assembled and underfilled semiconductor devices.

DESCRIPTION OF THE RELATED ART

When an integrated circuit (IC) chip is assembled on an insulatingsubstrate with conducting lines, such as a printed circuit motherboard,by solder bump connections, the chip is spaced apart from the substrateby a gap; the solder bump interconnections extend across the gap. The ICchip is typically a semiconductor such as silicon, silicon germanium, orgallium arsenide, the substrate is usually made of ceramic orpolymer-based materials such as FR-4. Consequently, there is asignificant difference between the coefficients of thermal expansion(CTE) of the chip and the substrate; for instance, with silicon (about2.5 ppm/° C.) as the semiconductor material and plastic FR-4 (about 25ppm/° C.) as substrate material, the difference in CTE is about an orderof magnitude. As a consequence of this CTE difference, thermomechanicalstresses are created on the solder interconnections, especially in theregions of the joints, when the assembly is subjected to temperaturecycling during device usage or reliability testing. These stresses tendto fatigue the joints and the bumps, resulting in cracks and eventualfailure of the assembly.

In order to distribute the mechanical stress and to strengthen thesolder joints without affecting the electrical connection, the gapbetween the semiconductor chip and the substrate is customarily filledwith a polymeric material, which encapsulates the bumps and fills anyspace in the gap. For example, in the well-known “C-4” process developedby the International Business Machines Corporation, polymeric materialis used to fill any space in the gap between the silicon chip and theceramic substrate.

The encapsulant is typically applied after the solder bumps haveundergone the reflow process and formed the metallic joints forelectrical contact between the IC chip and the substrate. A viscouspolymeric, thermoset precursor, sometimes referred to as the“underfill”, is dispensed onto the substrate adjacent to the chip and ispulled into the gap by capillary forces. The precursor is then heated,polymerized and “cured” to form the encapsulant; after the curingprocess, the encapsulant is hard and cannot be softened again.

It is well known in the industry that the temperature cycling needed forthe underfill curing process can create thermomechanical stress on itsown, which may be detrimental to the chip and/or the solderinterconnections. Additional stress is created when the assembly iscooled from the reflow temperature to ambient temperature. The stresscreated by these process steps may delaminate the solder joint, crackthe passivation of the chip, or propagate fractures into the circuitstructures. In general, the sensitivity to cracking of the layeredstructures of integrated circuits is increasing strongly with decreasingthickness of the various layers and increasing mechanical weakness oflow dielectric constant insulators.

SUMMARY OF THE INVENTION

Consequently, a need has arisen for an assembly methodology in which thestress-distributing benefits of the underfill material can be enjoyedwithout the deleterious side-effects of the underfilling process,resulting in enhanced device reliability. It is a technical advantage ifthe methodology provides an opportunity for device repair or re-working.The methodology should be coherent, low-cost, and flexible enough to beapplied to different semiconductor product families and a wide spectrumof design and process variations. It is another technical advantage, ifthese innovations are accomplished while shortening production cycletime and increasing throughput.

One embodiment of the invention is a tape for use as a carrier, whichcomprises a base sheet of polymeric, preferably thermoplastic, materialhaving first and second surfaces. A first polymeric adhesive film and afirst foil of different material are attached to the base sheet on boththe first and second surface sides; they thus provide a partialthickness to the tape. Further, a second polymeric adhesive film and asecond foil of different material are attached to the first foil on thesecond surface side. A plurality of holes is formed through the partialthickness of the tape; and a reflow metal element is placed in each ofthe holes; the element adheres to the second adhesive film, and haspreferably a diameter about equal to the partial thickness.

Another embodiment of the invention is a semiconductor device, whichcomprises a workpiece with an outline and plurality of contact pads andfurther an external part with a plurality of terminal pads. This part isspaced from the workpiece, and the terminal pads are aligned with theworkpiece contact pads, respectively. A reflow element interconnectseach of the contact pads with its respective terminal pad. Thermoplasticmaterial fills the space between the workpiece and the part; thismaterial adheres to the workpiece, the part and the reflow elements.Further, the material has an outline substantially in line with theoutline of the workpiece, and fills the space substantially withoutvoids.

When the workpiece is a semiconductor chip, the external part is asubstrate suitable for flip-assembly of the chip. When the workpiece isa semiconductor package encapsulating an assembled semiconductor chip,the external part is board suitable for flip-attachment of the package.Due to the thermoplastic character of the filling material, the finisheddevice can be reworked, when the temperature range for reflowing thereflow elements is reached.

Another embodiment of the invention is a method for assembling asemiconductor device, in which a workpiece with an outline and aplurality of contact pads is provided, further a tape as describedabove; the location of the holes, and thus the reflow metal elements inthe holes, match the locations the contact pads. The first foil isremoved from the first tape surface side, whereby the first polymericadhesive film on the first tape side is exposed. The reflow elements ofthe tape are then placed in contact with the contact pads of theworkpiece such that the first polymeric adhesive film on the first tapeside holds the workpiece in place. Thermal energy is supplied to theworkpiece and the tape sufficient to reflow the reflow elements andliquefy the thermoplastic base sheet. After cooling to ambienttemperature, the tape is attached to the workpiece substantially withoutleaving voids.

The process steps of the method may continue by providing an externalpart with a plurality of terminal pads in locations matching thelocations of the reflow elements in the tape holes. The second foil isremoved, together with the second polymeric adhesive film and the firstfoil, from the second surface side, whereby the first polymeric adhesivefilm on the second tape side is exposed. The reflow elements of the tapeare then placed in contact with the terminal pads of the external partsuch that the first polymeric adhesive film on the second tape sideholds the external part in place. Thermal energy is supplied to theworkpiece, the tape, and the external part sufficient to reflow thereflow elements and liquefy the thermoplastic base sheet. After coolingto ambient temperature, the tape is attached to the external part, whilethe workpiece is spaced apart from the external part and the space isfilled substantially without leaving voids.

When the workpiece is a semiconductor chip, the external part is asubstrate suitable for flip-assembly of the chip. When the workpiece isa semiconductor wafer containing a plurality of semiconductor devices,the external part is a substrate suitable for flip-assembly of thewafer. When the workpiece is a semiconductor package, which encapsulatesan assembled semiconductor chip, the external part is a board suitablefor flip-attachment of the package. When the workpiece is a stack ofsemiconductor packages, the external part is a board suitable forflip-attachment of the stack.

Embodiments of the present invention are related to flip-chipassemblies, ball grid array packages, chip-scale and chip-size packages,and other devices intended for reflow attachment to substrates and otherexternal parts. It is a technical advantage that the invention offers amethodology to reduce the thermomechanical stress between thesemiconductor part of a device and a substrate of dissimilar thermalexpansion coefficient while concurrently controlling essential assemblyparameters such as spacing between the semiconductor part and thesubstrate, adhesion between the parts, and selection of the temperatureranges needed in the assembly process. Additional technical advantagesderive from the fact that the devices made with the thermoplastic tapeare reworkable. Further, the process flow is simplified since theconventional underfill process after the flip-assembly is eliminated.

The technical advantages represented by certain embodiments of theinvention will become apparent from the following description of thepreferred embodiments of the invention, when considered in conjunctionwith the accompanying drawings and the novel features set forth in theappended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows schematically the cross section of a tape for use insemiconductor assembly in order to illustrate the structure of variousinsulating and adhesive layers according to the invention.

FIG. 2 shows schematically the cross section of the tape of FIG. 1having a hole with substantially vertical walls, formed to partiallypenetrate the thickness of the tape.

FIG. 3 is a schematic and simplified perspective view of the tape,showing a plurality of holes.

FIG. 4 shows schematically the cross section of the tape of FIG. 1having a hole with tapered walls, formed to partially penetrate thethickness of the tape.

FIG. 5 is a cross section of the tape of FIG. 2 with an element ofreflow metal positioned in the hole of the tape.

FIG. 6 is a schematic and simplified perspective view of the tape ofFIG. 3 with an element of reflow metal positioned in each hole.

FIG. 7 shows a schematic cross section of the tape of FIG. 5 afterremoval of the outermost layer of the tape structure.

FIG. 8 is a schematic perspective view of a tape structured as shown inFIG. 7 in the process of being attached to a circular workpiece, such asa semiconductor wafer.

FIG. 9 is a schematic perspective view of a tape structured as shown inFIG. 7 in the process of being attached to a rectangular workpiece, suchas a board-like entity containing a plurality of assembled andencapsulated semiconductor chips.

FIG. 10 is a schematic cross section of a portion of the tape attachedto a workpiece such as a semiconductor wafer.

FIG. 11 is a schematic cross section of a portion of the tape attachedto a workpiece such as a board-like entity containing a plurality ofassembled and encapsulated semiconductor chips.

FIG. 12 is a schematic cross section illustrating a portion of the tapeassembled on a workpiece as shown in FIG. 10 in a position invertedrelative to the position in FIG. 10.

FIG. 13 is a schematic cross section illustrating the tape portion ofFIG. 12 after removal of certain layers of the tape in order to exposethe attached reflow element.

FIG. 14 is a schematic cross section illustrating the tape portion ofFIG. 13 after removal of additional layers of the tape.

FIG. 15 is a schematic top view of the tape attached to a circularworkpiece after the process step of dicing.

FIG. 16 is a schematic perspective view of the tape attached to arectangular workpiece after the process step of dicing.

FIG. 17 is a schematic cross section illustrating a singulated tape unitwith a reflow element, assembled on an external part.

FIG. 18 exemplifies in a schematic cross section the assembled unit ofFIG. 17 as a semiconductor chip flip-attached onto an external board.

FIG. 19 exemplifies in a schematic cross section the assembled unit ofFIG. 17 as a semiconductor package comprising an encapsulated deviceflip-attached onto an external board.

FIG. 20 is a schematic cross section of a stack of semiconductorpackages flip-attached onto an external board using the assembly tape ofthe invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

One embodiment of the invention is depicted in the schematic crosssection of FIG. 1 as a tape, generally designated 100, for use as acarrier and specifically in semiconductor device assembly. Tape 100comprises a base sheet 101 of polymeric, preferably thermoplasticmaterial in the thickness range from about 25 to 450 μm; for somedevices, the thickness may reach approximately 800 μm. Preferredthermoplastic base sheet materials include long-chain polyimides withacrylic resin or silicone resin, long-chain polyethylenes with acrylicresin, and long-chain polypropylenes with acrylic resin. The base sheetmaterial is preferably selected so that it softens and enters the lowviscosity or liquid phase in the same temperature range, which is neededfor reflowing the reflow element embedded in the tape (see below). Thistemperature range includes, for example, the melting temperature of thesolder selected for assembling the device. It is a technical advantage,when the base sheet is selected from thermoplastic materials, since theprocesses of liquefying and solidifying the thermoplastic material maybe repeated numerous times without difficulty. Preferably, thecoefficient of thermal expansion is selected between about 8 and 120ppm, and the elasticity modulus between about 100 and 10000 MPa.

Base sheet 101 has a first surface 101 a and a second surface 101 b.Attached to the first surface 101 a are a first polymeric adhesive film102 followed by a first foil 103 of different material. In similarfashion, attached to the second surface 101 b are a first polymericadhesive film 104 followed by a first foil 105 of different material.The adhesive films 102 and 104 preferably include polymer materials suchas epoxy, polyimide, or silicone, which have not only adhesiveproperties, but can also easily be peeled off; the adhesive films have apreferred thickness range from about 25 to 100 μm. The foils 103 and 105comprise inert materials such as PVC and PET, and have a preferredthickness range from about 25 to 50 μm.

The combination of the base sheet 101, the polymeric adhesive films 102and 104, and the foils 103 and 105 provides a partial thickness 110 totape 100. It is this partial thickness 110, which is penetrated by aplurality of holes in tape 100 in order to provide space for reflowelements such as solder balls (see FIGS. 2 and 4).

As FIG. 1 shows, tape 100 further comprises a second polymeric adhesivefilm 106 attached to the first foil 105 on the second surface side ofthe base sheet, followed by a second foil 107. The second polymericadhesive film 106 is preferably selected from materials such as epoxy,polyimide, and silicone in the thickness range from about 25 to 100 μm.The second foil 107 is preferably an inert material such as PVC and PETin the thickness range from about 10 to 50 μm. Laminated tapes such astape 100 are commercially available and can be made to customspecification, for instance by the company Lintec, Japan.

As FIG. 3 schematically illustrates, a plurality of holes 301, 302, . .. , 30 n is formed in tape 100. The position of these holes can beselected in any predetermined pattern. FIG. 2 shows one specific hole ofdiameter 201 in more detail. The hole penetrates the laminated tape 100to the depth 110, which is defined in FIG. 1. Depth 110 reaches to thesecond polymeric adhesive film 106, but does not penetrate it fully.Among the techniques available for the opening processes are laser,mechanical drill, and mechanical punching. Experience has shown that thelaser technique is superior to the drilling or punching techniques. Thepreferred laser method is excimer laser, because excimer laser has anaccuracy of ±5 μm for defining the depth 110 and the diameter 201. Thehole may be round or may have any other predetermined outline; the holediameter may be same for all holes, or it may be different.

The hole illustrated in FIG. 2 is shown to have approximately verticalwalls. However, for certain applications such as stable fitting ofsolder balls, tapered walls as illustrated in FIG. 4 may be preferable.The tapered walls form an angle 401 with second adhesive film 106. Thepreferred angle 401 is between about 70° and 80°.

FIG. 6 illustrates how one reflow metal element is placed in each of theholes in tape 100. As an example, the reflow elements may be solderballs 601, 602, . . . , 60 n. FIG. 5 shows one specific reflow metalelement 501 in more detail in a hole of depth 110. Reflow element 501has preferably a diameter 502 equal to or slightly less than the holediameter 201. In area 503, reflow element 502 is in contact with secondpolymeric adhesive film 106 of tape 100; in this fashion, reflow element501 is securely held in place in the hole and cannot be dislodged orfall out, even when the tape is positioned upside down relative to theposition illustrated in FIG. 5 so that the hole opening with the reflowelement faces downward.

In order to highlight the technically superior features of tape 100,FIGS. 7 through 20 describe various process steps of assembly and devicefabrication employing a workpiece, which has an outline and a pluralityof contact pads. The tape is provided with the plurality of holes andinserted reflow elements in locations, which match the locations of thecontact pads of the workpiece. In embodiments for the semiconductorindustry, the workpiece is either a semiconductor wafer containing aplurality of semiconductor devices, or a semiconductor chip, or asemiconductor package, which encapsulates an assembled semiconductorchip on a substrate.

The process flow starts with FIG. 7, wherein the first foil 103 has beenremoved and the position of the hole with the inserted reflow element isinverted relative to the starting position in FIG. 5. First polymericadhesive film 102 is now exposed. Reflow element 501 remains firmly inplace, since it is in contact with polymeric adhesive film 106 in area503. For many applications, the size of element 501 and the hole havebeen selected so that element 501 is slightly protruding from the holeat this stage of the process flow.

As a specific workpiece, the schematic FIG. 8 shows in perspective viewa semiconductor wafer 801 with the plurality of semiconductor devicesfacing upward. Each device has a plurality of contact pads, facingupward. Tape 802 is positioned upside down as shown in the portion ofFIG. 7; the locations of the plurality of reflow elements in the tapeholes match the locations of the contact pads of the semiconductordevices on the wafer. As arrow 803 indicates, each reflow element oftape 802 is brought into contact with its corresponding contact pad ofwafer 801. For this embodiment, tape 802 has preferably the same outlineas the semiconductor wafer 801.

The simplified cross section of FIG. 10 illustrates tape 1001 contactingworkpiece 1002; as stated above, workpiece 1002 may be specifically asemiconductor wafer. At this stage, the assembly is ready for the nextprocess step of heating (see below).

As another specific workpiece, the schematic FIG. 9 shows a moldedentity 901 containing a plurality of semiconductor chips assembled on asubstrate and encapsulated by molding compound. The substrate has aplurality of contact pads for each assembled chip, facing upward. Tape902 is positioned upside down as shown in the portion of FIG. 7; thelocations of the plurality of reflow elements in the tape holes matchthe locations of the contact pads of the substrate of the molded entity901. As arrow 903 indicates, each reflow element of tape 902 is broughtinto contact with its corresponding contact pad of molded entity 901.For this embodiment, tape 902 has preferably the same outline as themolded entity 901.

The simplified cross section of FIG. 11 illustrates tape 1101 contactingworkpiece 1102; as stated above, workpiece 1102 may be specifically amolded semiconductor entity containing a plurality of assembledsemiconductor chips 1103 on a substrate 1104; the chips 1103 areconnected to substrate 1104 by bonding wires 1105 and encapsulated bymolding compound 1106. At this stage, the assembly is ready for the nextprocess step of heating (see below).

The schematic cross section of FIG. 12 illustrates the next step of thefabrication process. Each reflow element 1203 of the tape is broughtinto contact with the respective contact pad 1205 of the workpiece; forexample, the workpiece may be a semiconductor chip or a semiconductorpackage. This step may be facilitated by the first polymeric adhesivefilm 102 holding workpiece 1201 in place. Thermal energy is thensupplied to workpiece 1201 and tape 1202 sufficient to reflow the reflowelement 1203 and liquefy the thermoplastic base sheet 1204 (designated101 in FIG. 1 before liquefying), whereby tape 1202 is attached toworkpiece 1201. In FIG. 12, the effect of the heating cycle isschematically indicated by two results: The reflow element (for example,solder ball) has formed a joint 1206 across the whole length of pad1205, while the remaining surface of the element has been pulled bysurface tension into an approximately spherical shape. The softenedthermoplastic material 1204 has filled the available space 1207 aroundjoint 1206 and the reflowed metal neck 1208. By selecting theappropriate heating temperature and time, the surrounding thermoplasticmaterial is filling space 1207 substantially without leaving voids.

When those embodiments, in which the workpiece is an individual chip cran individual package, have been cooled to ambient temperature, thethermoplastic material has formed an outline, which is substantially inline with the outline of the workpiece. As defined herein, “in line”does not only include straight line, continuing the outline of theworkpiece; it also includes minor concave or convex contours. However,“in line” excludes the well-known meniscus, which is typically formed inconventional technology by dispensing thermoset underfill material. Inthe conventional fabrication process, the low-viscosity thermosetmaterial is driven by surface tension to protrude somewhat outside theworkpiece contours to form the well-known meniscus.

In the next process step, the second foil 107 and the second polymericadhesive film 106 are removed, exposing the approximately sphericalshape of the reflow element 1203. The result is displayed in FIG. 13. Inthe next process step, the first foil 105 from the second tape surfaceside is removed, exposing the first polymeric adhesive film 104 on thesecond side of tape 1204. The result is displayed in FIG. 14.

When workpiece 1201 is not an individual semiconductor chip, but a wholesemiconductor wafer containing a plurality of semiconductor devices, thenext process step after the stage shown in FIG. 14 comprises theseparation of the wafer, assembled with the tape, into discreteassembled devices. The preferred method of separation is sawing. Theschematic top view of FIG. 15 illustrates the result of this step.

When workpiece 1201 is not an individual semiconductor package, but awhole molded entity containing a plurality of assembled and encapsulatedsemiconductor chips, the next process step after the stage shown in FIG.14 comprises the separation of the entity, assembled with the tape, intodiscrete assembled devices. The preferred method of separation issawing. The schematic perspective view of FIG. 16 illustrates the resultof this step.

For the next process step, an external part is provided, which has aplurality of terminal pads in locations matching the locations of thereflow elements. As an example, the external part may be a substratesuitable for flip-assembly of the semiconductor chip, which haspreviously been attached to the tape. As another example, the externalpart ray be a substrate suitable for flip-assembly of a wholesemiconductor wafer. As yet another example, the external part may be aboard suitable for flip-assembly of the semiconductor package, which haspreviously been attached to -he tape.

In FIG. 17, the external part is designated 1701, and one of theplurality of terminal pads is designated 1702. The workpiece 1201 withits contact pad 1205 together with the attached remainder 1720 of thetape and the reflow element form unit 1710. Notice that the sidecontours of unit 1710 are shown as substantially straight contours 1711;the straight contours are a consequence either of the singulation stepsdescribed above, or of the assembly using the tape with thethermoplastic base sheet.

The reflow element 1203 of the tape, soldered to workpiece contact pad1205, is placed in contact with the terminal pad 1702 of the externalpart. In addition, the first polymeric adhesive film 104 on the secondtape side may hold the external part 1701 in place. Thermal energy isthen supplied to the workpiece 1201, the tape 1720, and the externalpart 1701 sufficient to reflow the reflow element 1203 and to liquefythe thermoplastic base sheet 1204 of the tape 1720. In FIG. 17, theeffect of the heating cycle is schematically indicated by two results:The reflow element 1203 has formed a joint 1706 across the whole lengthof terminal pad 1202; and the softened thermoplastic material 1204 hasfilled the available space 1707 around joint 1706 and the reflowed metalneck 1708. By selecting the appropriate heating temperature and time,the surrounding thermoplastic material is filling space 1707substantially without leaving voids. Further, after cooling to ambienttemperature, the thermoplastic material 1204 has approximately retainedits outline 1711, which is substantially in line with the outline 1711of the workpiece.

As a result of the assembly process, the tape 1720 and the workpiece1201 are attached to the external part 1701, while the workpiece 1201 isspaced apart form the external part 1701. The thermoplastic “underfill”material is in place to mitigate thermo-mechanical stress at the reflowinterconnection and the solder joints due to its insignificant thermalshrinkage compared to conventional thermoset underfill materials. Thefinished product is generally designated 1700 in FIG. 17.

For the assembly process steps described above, the materials for thepolymeric adhesive films 102, 104, and 106 are preferably selected sothat they remain sticky in the temperature range from ambienttemperature to about 300° C. and even higher, do not require a specificcuring process, and have a decomposition temperature above about 300° C.

It is evident from the above description of the material selection andprocess flow that no flux is required for the metal reflow and solderingaction, and any process-related stress on the metal reflow ball duringthe temperature cycles is minimized due to the continued presence of thethermoplastic polymer. Further, the thermoplastic material fills anyavailable space substantially void-free. Experience has further shownthat the choice of thermoplastic material and its continued presenceduring the fabrication process provides the semiconductor products withcharacteristics of reliability performances under use conditions as wellas tests of temperature cycling, moisture sensitivity, and dropexaminations, which are three to ten times higher than productsmanufactured using prior art fabrication technologies.

The schematic FIG. 18 is an example of an embodiment, in which theworkpiece is a semiconductor chip 1801 flip-attached by means of tape1820 onto an external board 1802. In the reflow process step, the solderjoint formation and the substantially void-free underfilling areperformed concurrently. Notice that the tape 1820 has an outline 1821substantially in line with the outline 1801 a of the chip 1801. Thisapproximately straight outline is a consequence of the thermoplasticnature of the tape base material; for a chip singulated from a wafer itmay also be created by the chip separation process.

The schematic FIG. 19 is an example of an embodiment, in which theworkpiece is a semiconductor package 1901 having a substrate 1902 withterminal pads, which are attached by means of tape 1920 onto an externalboard 1902. In the reflow process step, the solder joint formation andthe substantially void-free underfilling are performed concurrently.Notice that the tape 1920 has an outline 1921 substantially in line withthe outline 1901 a of the package 1901. This approximately straightoutline is a consequence of the thermoplastic nature of the tape basematerial; for a package singulated from a molded entity it may also becreated by the package separation process.

Another embodiment, a semiconductor product generally designated 2000,is displayed in the schematic FIG. 20. A first package 2001 having anextended substrate 2002 is attached by means of tape 2010 to a secondpackage 2020, also having an extended substrate 2021. The stack of twopackages is attached by means of tape 2030 to an external part such as aboard 2040. The use of thermoplastic material in the base sheet of tapes2010 and 2030 enables a substantially straight outline 2011 and 2031.Stacks of packages are generally known to be sensitive tothermo-mechanical stress due to the distributed components of widelydifferent coefficients of thermal expansion (silicon, metals, polymers,etc.). It is, therefore, a particular technical advantage of theinvention to offer a stack structure and fabrication method based onthermoplastic underfill material, which reduces thermo-mechanical stresssignificantly by having a much smaller thermal shrinking than thethermoset materials of conventional art. With this advantage, it is easyfor someone skilled in the art to construct composite devices in view ofFIG. 20, which can be realized by the concept and method of theinvention.

While this invention has been described in reference to illustrativeembodiments, this description is not intended to be construed in alimiting sense. Various modifications and combinations of theillustrative embodiments, as well as other embodiments of the invention,will be apparent to persons skilled in the art upon reference to thedescription. As an example, for assemblies having interconnectionelements with significantly higher or lower reflow temperatures,suitable base sheet thermoplastics and adhesives can be formulated bymodifying the polymer chains of their materials. As another example,underfill materials of lower coefficients of thermal expansion can beformulated by adding inert (inorganic) fillers to the polymer basematerial. It is therefore intended that the appended claims encompassany such modifications and embodiments.

1. A tape for use as a carrier comprising: a base sheet of polymermaterial having first and second surfaces; a first polymeric adhesivefilm and a first foil of different material attached to said base sheeton said first and said second surface sides, providing a partialthickness to said tape; a second polymeric adhesive film and a secondfoil of different material attached to said first foil on said secondsurface side; a plurality of holes through said partial thickness ofsaid tape; and a reflow metal element in each of said holes, saidelement adhering to said second polymeric adhesive film.
 2. The tapeaccording to claim 1 wherein said polymer material of said base sheetcomprises a thermoplastic material selected from long-chain polyimideswith acrylic resin or silicone resin, polyethylenes with acrylic resin,and polypropylenes with acrylic resin.
 3. The tape according to claim 1wherein said base sheet has a thickness between about 25 and 450 μm. 4.The tape according to claim 1 wherein said polymeric adhesive films havea thickness between about 25 and 100 μm and comprise polymers includingepoxies and polyimides, and silicones.
 5. The tape according to claim 1wherein said foils of different materials have a thickness between about10 and 50 μm and comprise inert materials including PVC and PET.
 6. Thetape according to claim 1 wherein said hole is tapered to form an anglebetween about 70° and 80° with said second surface.
 7. The tapeaccording to claim 1 wherein said reflow elements have a diameter aboutequal to said partial thickness.
 8. The tape according to claim 1wherein said reflow metal elements are solder balls.
 9. The tapeaccording to claim 1 wherein said reflow metal elements are soldercylinders.
 10. The tape according to claim 1 wherein said reflowelements comprise tin or tin alloys including tin/silver/copper.
 11. Atape for use as a carrier comprising: a base sheet of thermoplasticmaterial having first and second surfaces; a first polymeric adhesivefilm and a first foil of different material attached to said base sheeton said first and said second surface sides, providing a partialthickness to said tape; a second polymeric adhesive film and a secondfoil of different material attached to said first foil on said secondsurface side; a plurality of holes through said partial thickness ofsaid tape; and a reflow metal element in each of said holes, saidelement adhering to said second polymeric adhesive film.
 12. Asemiconductor device, comprising: a workpiece having an outline andplurality of contact pads; an external part having a plurality ofterminal pads, said part spaced from said workpiece, and said terminalpads aligned with said workpiece contact pads, respectively; a reflowelement interconnecting each of said contact pads with its respectiveterminal pad; and thermoplastic material filling said space between saidworkpiece and said part, said material adhering to said workpiece, saidpart and said reflow elements, said material having an outlinesubstantially in line with said outline of said workpiece, and fillingsaid space substantially without voids.
 13. The device according toclaim 12 wherein said workpiece is a semiconductor chip, and saidexternal part is a substrate suitable for flip-assembly of said chip.14. The device according to claim 12 wherein said workpiece is asemiconductor package encapsulating an assembled semiconductor chip, andsaid external part is a board suitable for flip-attachment of saidpackage.
 15. The device according to claim 12 wherein saidthermo-plastic filling material is operable to turn into a viscous fluidwithin approximately the same temperature range employed for reflowingsaid reflow elements.
 16. A method for assembling a semiconductor devicecomprising the steps of: providing a workpiece having an outline and aplurality of contact pads; providing a tape having a base sheet ofthermoplastic material and first and second surfaces; a first polymericadhesive film and a first foil of different material attached to saidbase sheet on said first and second surface sides, providing a partialthickness to said tape; a second polymeric adhesive film and a secondfoil of different material attached to said first foil on said secondsurface side; a plurality of holes through said partial thickness ofsaid tape; a reflow metal element in each of said holes, said elementadhering to said second polymeric adhesive film; the location of saidholes, and thus said reflow metal elements in said holes, matching thelocations of said contact pads; removing said first foil from said firsttape surface side, exposing said first polymeric adhesive film on saidfirst tape side; placing said reflow elements of said tape in contactwith said contact pads of said workpiece, respectively; supplyingthermal energy to said workpiece and said tape sufficient to reflow saidreflow elements and liquefy said thermoplastic base sheet; and coolingsaid workpiece and said tape to ambient temperature, thus attaching saidtape to said workpiece.
 17. The method according to claim 16 whereinsaid process step of contacting reflow elements and respective contactpads is facilitated by said first adhesive film on said first tape sideholding said workpiece in place.
 18. The method according to claim 16wherein said liquefied thermoplastic base sheet surrounds said reflowelements substantially without voids.
 19. The method according to claim16 further comprising the steps of: providing an external part having aplurality of terminal pads in locations matching the locations of saidreflow elements in said tape holes; removing said second foil, saidsecond polymeric adhesive film, and said first foil from said secondsurface side, exposing said first polymeric adhesive film on said secondtape side; placing said reflow elements of said tape in contact withsaid terminal pads of said external part such that said first polymericadhesive film on said second tape side holds said external part inplace; supplying thermal energy to said workpiece, said tape, and saidexternal part sufficient to reflow said reflow elements and liquefy saidthermoplastic base sheet; and cooling said workpiece, said tape, andsaid external part to ambient temperature, thus attaching said tape tosaid external part, while spacing said workpiece apart from saidexternal part.
 20. The method according to claim 19 wherein saidliquefied thermoplastic base sheet fills said space between saidworkpiece and said external part substantially without voids.
 21. Themethod according to claims 16 or 19 wherein said workpiece is asemiconductor chip, and said external part is a substrate suitable forflip-assembly of said chip.
 22. The method according to claims 16 or 19wherein said workpiece is a semiconductor wafer containing a pluralityof semiconductor devices, and said external part is a substrate suitablefor flip-assembly of said wafer.
 23. The method according to claim 22further comprising the step of separating said assembled wafer intodiscrete assembled chips, thereby singulating semiconductor devices. 24.The device according to claims 16 or 19 wherein said workpiece is asemiconductor package, which encapsulates an assembled semiconductorchip on a substrate, and said external part is a board suitable forflip-attaching said package.
 25. The device according to claims 16 or 19wherein said workpiece is a stack of semiconductor packages, and saidexternal part is a board suitable for flip-attaching said stack.